In LED packages, silver, with its electrical and optical advantages, is used as an electrode and reflective material. The oxygen plasma normally used in semiconductor packages cannot be used because the silver becomes black and oxidized and discolored. Aqua Plasma® is a reductive plasma cleaning process, which means that it can clean silver without oxidizing it. As a result of treatment of silver oxide with Aqua Plasma®, the areas that were oxidized and discolored to black are reduced and returned to their original silver color.